Translator Disclaimer
19 September 1995 Self-learning intellectual system of expert diagnostics of technological malfunctions in ULSI manufacturing
Author Affiliations +
Abstract
The field of Information Intellectual System (IIS) application in technology spreads over solving problems, that cannot be easily formalized and that are connected with the diagnostics and quality control of ULSI. One of the main tasks of IIS in the technology of Microelectronics is the precedent search. Another task no less serious is to mathematically process technological experience using information coded array. The purpose of it is, firstly, to establish interrelation between symptomatic and failures and, secondly, to choose an optimal plan of rehabilitation of the technological process and the crystal. The paper describes the basic concepts and principles of software and mathematical software development for computer system of expert diagnostics of technological malfunctions in ULSI manufacturing. The system includes: data base (DB), knowledge base (KB), and subsystems (of precedent search, expert diagnostics and consultations on rehabilitation). DB and KB contain information of defects. The research prototype of this system was realized on IBM PC3.5.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter A. Arutyunov and Mikhail G. Kuznetsov "Self-learning intellectual system of expert diagnostics of technological malfunctions in ULSI manufacturing", Proc. SPIE 2637, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing, (19 September 1995); https://doi.org/10.1117/12.221315
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top