Advanced optical characterization techniques for borophosphosilicate films

Ronald A. Carpio; Jon Taylor

doi:10.1117/12.221205

18 September 1995 Advanced optical characterization techniques for borophosphosilicate films

Ronald A. Carpio, Jon Taylor

Proceedings Volume 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II; (1995) https://doi.org/10.1117/12.221205
Event: Microelectronic Manufacturing '95, 1995, Austin, TX, United States

Abstract

FTIR spectra of borophosphosilicate (BPSG) films which are obtained by metal backed configurations are compared to those obtained by the conventional normal incidence transmission geometry. Sensitivity advantages are demonstrated for both hydrogen incorporation and dopant analyses. P-polarized measurements are explored for preferential excitation of vibrational modes. Reflectance measurements of BPSG films on silicon by FTIR and by the emerging techniques of spectroscopic ellipsometry (SE) both in the UV-visible and mid-IR spectral ranges are reviewed. The use of differential and derivative spectral data anlysis is illustrated for investigating structural and compositional changes which occur from film densification and in the course of film storage.

Citation Download Citation

Ronald A. Carpio and Jon Taylor "Advanced optical characterization techniques for borophosphosilicate films", Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995); https://doi.org/10.1117/12.221205

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