Energy spectra of electrons emitted from samples with an internal electric field

Jadwiga Olesik; Bogdan Calusinski; Zygmunt Olesik

doi:10.1117/12.221214

18 September 1995 Energy spectra of electrons emitted from samples with an internal electric field

Jadwiga Olesik, Bogdan Calusinski, Zygmunt Olesik

Proceedings Volume 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II; (1995) https://doi.org/10.1117/12.221214
Event: Microelectronic Manufacturing '95, 1995, Austin, TX, United States

Abstract

This work is concerned with electron emission induced by an electric field and photoemission assisted by the field. The applied samples were emitters in the shape of semiconducting films evaporated on both sides of a glass substrate of thickness 0,2 mm. One side was an emitting surface whereas the other was a field electrode. The field electrode was supplied by negative polarizing voltage U_pol. The emitting materials were In₂O₃:Sn and titanium films. As a result of applying U_pol and illumination, electrons and photoelectrons are released and enter electron multiplier. Amplitude spectra of pulses were recorded by a multichannel analyser of pulse voltage. Energy analysis of electrons released from the samples was performed by the method of retarding field. Amplitude spectra at a given U_pol and changing retarding field for titanium and oxide layers were compared. It was found that electron energy can exceed even 50eV. For both types of films the influence of illumination of electron emission induced by an electric field was also investigated.

Citation Download Citation

Jadwiga Olesik, Bogdan Calusinski, and Zygmunt Olesik "Energy spectra of electrons emitted from samples with an internal electric field", Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995); https://doi.org/10.1117/12.221214

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