18 September 1995 Light scattering from patterned surfaces and particles on surfaces
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Abstract
In this paper, we investigate coherent light scattering from patterned surfaces, patterned surfaces with defects, spherical particles, and nonspherical particles. Experimental and theoretical results are compared quantitatively to verify the model accuracy. Experimentation involves the usage of the Arizona State University/Semiconductor Research Corporation die and particles deposited on bare silicon wafers. This die contains numerous 3D structures of varying sizes representative of current and future design geometries. Polystyrene particles are deposited on the die and their position is verified with the aid of an optical microscope. The sample is then scanned using the ASU test apparatus which allows angle resolved data collection for the surface structures and the structure with the particles. Comparison between the two data sets are made to determine experimentally the particle/pattern interaction. Collected data is also quantitatively compared to theoretically determined values to verify model accuracy. Light scattering and SEM photographs are acquired for the same individual particles to allow accurate modeling.
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Brent Martin Nebeker, Brent Martin Nebeker, Greg W. Starr, Greg W. Starr, E. Dan Hirleman, E. Dan Hirleman, } "Light scattering from patterned surfaces and particles on surfaces", Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995); doi: 10.1117/12.221206; https://doi.org/10.1117/12.221206
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