Package and module substrate interconnect evaluation by thermal time domain reflectometry (TTDR)

Sugoog Shon; Robert H. Flake; Anthony Wong

doi:10.1117/12.221209

18 September 1995 Package and module substrate interconnect evaluation by thermal time domain reflectometry (TTDR)

Sugoog Shon, Robert H. Flake, Anthony Wong

Proceedings Volume 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II; (1995) https://doi.org/10.1117/12.221209
Event: Microelectronic Manufacturing '95, 1995, Austin, TX, United States

Abstract

A TAB package inner lead interconnect is characterized experimentally by thermal time- domain reflectometry. In order to estimate the low frequency thermal characteristic impedance of the lead in a module substrate, we apply TPA (total pulse area) steady state methodology to analyze transient TTDR measurements. TAB ILB bond thicknesses are measured and compared with estimates of the thermal resistances of short portions of the inner leads terminating at the ILB. The ILB thermal constriction and contact resistance of the bonds measured appear to be negligible compared to the lead resistance.

Citation Download Citation

Sugoog Shon, Robert H. Flake, and Anthony Wong "Package and module substrate interconnect evaluation by thermal time domain reflectometry (TTDR)", Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995); https://doi.org/10.1117/12.221209

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available