19 September 1995 Fabrication issues in micromachined tunable optical filters
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Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221270
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Prototypes of micromachined tunable infrared optical filters are being produced. Micromachining silicon for use in these filters requires the integration of multilayer dielectric optical coatings such as ZnSe/ThF4. These coatings are novel materials for integration with microlithographic processing. Devices were engineered and a process flow was developed to avoid contaminating processing tools with the coating. A method for patterning the coating was developed. Low-temperature bonding techniques have been explored and tested. Fabrication issues for these micromachined devices are discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James F. Klemic, James F. Klemic, J. Marcos Sirota, J. Marcos Sirota, Mehran Mehregany, Mehran Mehregany, } "Fabrication issues in micromachined tunable optical filters", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221270; https://doi.org/10.1117/12.221270

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