19 September 1995 Laser vibrometer system to examine the dynamic modal analysis of resonant micromechanical structures
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Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995); doi: 10.1117/12.221277
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
An interferometric system is described which can measure the dynamic performance of micromechanical structures. Modes of vibration and resonant frequencies are calculated for cantilevers and bridges which have been formed from boron-doped silicon. It is shown that a cantilever can be described by a beam model, whereas the bridge fits more appropriately to string behavior. This penomenon is explained by a cantilever, after annealing, being able to relieve the tension introduced at the doping stage. The fixed structure of the bridge is unable to accomodate this, however, and the doping-induced tension becomes the dominant factor in the structure's behavior.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Wood, James S. Burdess, R. Pitcher, Alun J. Harris, Jane L. Cruickshank, "Laser vibrometer system to examine the dynamic modal analysis of resonant micromechanical structures", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221277; https://doi.org/10.1117/12.221277
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KEYWORDS
Bridges

Doping

Modal analysis

Interferometry

Laser systems engineering

Boron

Motion measurement

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