19 September 1995 Novel high-power Nd:YLF laser for CVD-diamond micromachining
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Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221294
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
Chemical vapor deposited diamond films have been grown successfully for a number of years, and through advances in processing technology, tooling investments, and volume, growth processes have become affordable for many commercial purposes. The remarkable properties of diamond, including hardness, thermal conductivity and optical properties, make it an ideal choice of material in many applications. A key to affordability of diamond products for commercial purposes is the ability to machine the films into desirable shapes. Because of diamond's hardness, photons are an obvious choice of 'cutting medium'. This paper will discuss the available laser sources and in what circumstances they are being used to achieve desired results. Focus will then be placed on a new Nd:YLF laser based system which was built specifically to machine CVD diamond at high speed and produce low taper angle features with UV excimer laser-like quality.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ronald D. Schaeffer, Ronald D. Schaeffer, } "Novel high-power Nd:YLF laser for CVD-diamond micromachining", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221294; https://doi.org/10.1117/12.221294
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