19 September 1995 Tunneling tip protection for a bulk micromachined accelerometer
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Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221289
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Ultrasensitive accelerometers are needed by NASA for the measurement of orbital drag. We have designed an accelerometer capable of measuring 10-8. In this paper, a method for fabricating a bulk micromachined accelerometer which incorporates a tunneling tip is presented. To meet sensitivity sepcifications, a weak spring and large mass are needed. However, these represent a delicate mechanism and a method of protection is provided by electrostatically clamping the proof mass in a fixed position. The effectiveness of the electrostatic clamp has been measured. It is found that clamping against an acceleration of 200 g is possible with voltages as low as 30 volts.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul M. Zavracky, Paul M. Zavracky, Bob McClelland, Bob McClelland, Jianchao Wang, Jianchao Wang, Frank T. Hartley, Frank T. Hartley, } "Tunneling tip protection for a bulk micromachined accelerometer", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221289; https://doi.org/10.1117/12.221289


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