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Microanalysis to nanoanalysis: analytical techniques for chemical characterization of micrometer- to nanometer-scale structures
E-beam lithography: a suitable technology for fabrication of high-accuracy 2D and 3D surface profiles
FIB 601 focused ion beam fabrication of micron-sized apertures for the NASA AXAF x-ray telescope prelaunch calibration
Design and fabrication of micromachined electron guns (MEGs) using a multiple-level planar tungsten process
Application of the prototype NIST SRM 2090A SEM magnification standard in a manufacturing environment
Fine pitch grids for an x-ray solar imaging spectrometer fabricated by optical lithography and XeF2 etching
Effects of doping on the dynamic mechanical response of semiconductor cantilevers to electrostatic forces