Fabrication of miniaturized electrostatic deflectors using LIGA

Keith H. Jackson; Chantal G. Khan Malek; Lawrence P. Murray; William D. Bonivert; Jill M. Hruby; John T. Hachman; T. H.J. Chang

doi:10.1117/12.222649

26 September 1995 Fabrication of miniaturized electrostatic deflectors using LIGA

Keith H. Jackson, Chantal G. Khan Malek, Lawrence P. Murray, William D. Bonivert, Jill M. Hruby, John T. Hachman, T. H.J. Chang

Author Affiliations +

Proceedings Volume 2640, Microlithography and Metrology in Micromachining; (1995) https://doi.org/10.1117/12.222649
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

We are currently investigating the fabrication of high precision, miniaturized, electrostatic deflectors for use in electron or ion beam micro-columns. These columns can be used in a broad array of applications including microscopy, spectroscopy and lithography. Typically, micro-columns consist of a field emitter tip, a set of micromachined miniaturized lenses and one or more electrostatic deflectors. Miniaturization of the column allows the use of simple electrostatic lenses to achieve very high performance in a package that is just a few millimeters in length. Presently, all reported microcolumns have included miniaturized but conventionally-machined octupole deflector plates. If micromachined plates are used instead, lower deflection voltage is required for deflection, and the system becomes more amenable to very high speed operation. In addition, some reduction in scan field distortion is expected. These improvements results directly from the higher degree of miniaturization, tighter dimensional control, better placement accuracy, and smoother facets offered by micromachining. Given the dimensions (100 micrometers - 1000 micrometers thick) and tolerances (1 - 10 micrometers ) required, LIGA is well suited to fabricate such miniature deflectors. This paper will describe the fabrication of the deflectors using LIGA. The Center for X-ray Optics has built an endstation at Lawrence Berkeley National Laboratory's Advanced Light Source suitable for LIGA X-ray exposures.

Citation Download Citation

Keith H. Jackson, Chantal G. Khan Malek, Lawrence P. Murray, William D. Bonivert, Jill M. Hruby, John T. Hachman, and T. H.J. Chang "Fabrication of miniaturized electrostatic deflectors using LIGA", Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); https://doi.org/10.1117/12.222649

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