26 September 1995 Microfabrication of channel electron multipliers
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Proceedings Volume 2640, Microlithography and Metrology in Micromachining; (1995) https://doi.org/10.1117/12.222657
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Channel electron multipliers are vacuum-electron devices for detection of charged particles and energetic photons. Several manufacturing technologies for microelectronics and microelectromechanical systems hold significant promise for the development of a new generation of silicon-based channel electron multipliers with greater capabilities and broader applications than conventional glass-based ones. This paper describes several approaches to microfabrication of such devices using surface and bulk micromachining techniques. Results are presented for fully micromachined channel electron multipliers with signal gains in the range of 102 - 106.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. William Tasker, G. William Tasker, Scott T. Bentley, Scott T. Bentley, Steven M. Shank, Steven M. Shank, Robert J. Soave, Robert J. Soave, Alan M. Then, Alan M. Then, } "Microfabrication of channel electron multipliers", Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222657; https://doi.org/10.1117/12.222657

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