Translator Disclaimer
26 September 1995 Rapid fabrication of molds by mechanical micromilling: process development
Author Affiliations +
Proceedings Volume 2640, Microlithography and Metrology in Micromachining; (1995)
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
At the macroscale, the milling process is very versatile and capable of creating 3D features and structures. Adaptation of this process at the microscale could lead to the rapid and direct fabrication of micromolds and masks to aid in the development of microcomponents. This task has been undertaken and results of the process indicate it can become an increasingly useful method. The micromilling process is currently characterized by milling tools with a diameter as small as 22 micrometers. The micromilling process can create trench-like features with vertical sidewalls and good smoothness. External corners are sharp and stepped features can be machined simply by programming those shapes. The process is direct and therefore dimensional errors do not accumulate as can occur with serial fabrication processes.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Craig R. Friedrich and Bharath Kikkeri "Rapid fabrication of molds by mechanical micromilling: process development", Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995);


Micromachining using Helios
Proceedings of SPIE (May 19 1995)
Enhanced Pattern Accuracy With Mebes III
Proceedings of SPIE (June 18 1984)
SOR Lithography in West Germany
Proceedings of SPIE (August 01 1989)
Optimization of an x ray mask design for use with...
Proceedings of SPIE (August 01 1991)
X-ray phase mask: nanostructures
Proceedings of SPIE (July 07 1997)

Back to Top