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A thermo-optic modulator/switch has been fabricated using the antiresonant reflecting optical waveguide. The device is based on a Mach-Zehnder interferometer with a thin film metal heater placed in the vicinity of one of its arms. Preliminary tests reveal that the device has a good on-off ratio with a switching response time of 1 ms.
Kamel Benaissa,Y. Lu, andArokia Nathan
"Design and fabrication of ARROW thermo-optic modulators", Proc. SPIE 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, (13 September 1995); https://doi.org/10.1117/12.220938
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Kamel Benaissa, Y. Lu, Arokia Nathan, "Design and fabrication of ARROW thermo-optic modulators," Proc. SPIE 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, (13 September 1995); https://doi.org/10.1117/12.220938