13 September 1995 Design and fabrication of ARROW thermo-optic modulators
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Proceedings Volume 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications; (1995); doi: 10.1117/12.220938
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
A thermo-optic modulator/switch has been fabricated using the antiresonant reflecting optical waveguide. The device is based on a Mach-Zehnder interferometer with a thin film metal heater placed in the vicinity of one of its arms. Preliminary tests reveal that the device has a good on-off ratio with a switching response time of 1 ms.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kamel Benaissa, Y. Lu, Arokia Nathan, "Design and fabrication of ARROW thermo-optic modulators", Proc. SPIE 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, (13 September 1995); doi: 10.1117/12.220938; https://doi.org/10.1117/12.220938
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KEYWORDS
Thermal optics

Switching

Modulators

Waveguides

Metals

Resistors

Silica

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