PROCEEDINGS VOLUME 2642
MICROMACHINING AND MICROFABRICATION | 23-25 OCTOBER 1995
Micromachined Devices and Components
MICROMACHINING AND MICROFABRICATION
23-25 October 1995
Austin, TX, United States
Actuators and Mechanical Devices I
Proc. SPIE 2642, Micromachined Devices and Components, pg 10 (15 September 1995); doi: 10.1117/12.221154
Proc. SPIE 2642, Micromachined Devices and Components, pg 22 (15 September 1995); doi: 10.1117/12.221166
Proc. SPIE 2642, Micromachined Devices and Components, pg 33 (15 September 1995); doi: 10.1117/12.221176
Proc. SPIE 2642, Micromachined Devices and Components, pg 40 (15 September 1995); doi: 10.1117/12.221182
Actuators and Mechanical Devices II
Proc. SPIE 2642, Micromachined Devices and Components, pg 52 (15 September 1995); doi: 10.1117/12.221183
Proc. SPIE 2642, Micromachined Devices and Components, pg 64 (15 September 1995); doi: 10.1117/12.221184
Proc. SPIE 2642, Micromachined Devices and Components, pg 74 (15 September 1995); doi: 10.1117/12.221185
Proc. SPIE 2642, Micromachined Devices and Components, pg 84 (15 September 1995); doi: 10.1117/12.221186
Proc. SPIE 2642, Micromachined Devices and Components, pg 95 (15 September 1995); doi: 10.1117/12.221155
Chemical and Biological Sensors
Proc. SPIE 2642, Micromachined Devices and Components, pg 104 (15 September 1995); doi: 10.1117/12.221158
Proc. SPIE 2642, Micromachined Devices and Components, pg 110 (15 September 1995); doi: 10.1117/12.221159
Proc. SPIE 2642, Micromachined Devices and Components, pg 121 (15 September 1995); doi: 10.1117/12.221160
Proc. SPIE 2642, Micromachined Devices and Components, pg 130 (15 September 1995); doi: 10.1117/12.221161
Proc. SPIE 2642, Micromachined Devices and Components, pg 138 (15 September 1995); doi: 10.1117/12.221162
Flow and Electromagnetic Devices
Proc. SPIE 2642, Micromachined Devices and Components, pg 150 (15 September 1995); doi: 10.1117/12.221163
Proc. SPIE 2642, Micromachined Devices and Components, pg 156 (15 September 1995); doi: 10.1117/12.221164
Proc. SPIE 2642, Micromachined Devices and Components, pg 166 (15 September 1995); doi: 10.1117/12.221165
Proc. SPIE 2642, Micromachined Devices and Components, pg 173 (15 September 1995); doi: 10.1117/12.221167
Proc. SPIE 2642, Micromachined Devices and Components, pg 183 (15 September 1995); doi: 10.1117/12.221168
Modeling
Proc. SPIE 2642, Micromachined Devices and Components, pg 194 (15 September 1995); doi: 10.1117/12.221169
Proc. SPIE 2642, Micromachined Devices and Components, pg 206 (15 September 1995); doi: 10.1117/12.221170
Proc. SPIE 2642, Micromachined Devices and Components, pg 215 (15 September 1995); doi: 10.1117/12.221171
Proc. SPIE 2642, Micromachined Devices and Components, pg 225 (15 September 1995); doi: 10.1117/12.221172
Proc. SPIE 2642, Micromachined Devices and Components, pg 233 (15 September 1995); doi: 10.1117/12.221173
Pressure Sensors and Packaging
Proc. SPIE 2642, Micromachined Devices and Components, pg 242 (15 September 1995); doi: 10.1117/12.221174
Proc. SPIE 2642, Micromachined Devices and Components, pg 250 (15 September 1995); doi: 10.1117/12.221175
Proc. SPIE 2642, Micromachined Devices and Components, pg 256 (15 September 1995); doi: 10.1117/12.221177
Proc. SPIE 2642, Micromachined Devices and Components, pg 265 (15 September 1995); doi: 10.1117/12.221178
Proc. SPIE 2642, Micromachined Devices and Components, pg 273 (15 September 1995); doi: 10.1117/12.221179
Poster Session
Proc. SPIE 2642, Micromachined Devices and Components, pg 282 (15 September 1995); doi: 10.1117/12.221180
Proc. SPIE 2642, Micromachined Devices and Components, pg 290 (15 September 1995); doi: 10.1117/12.221181
Plenary Papers
Proc. SPIE 2642, Micromachined Devices and Components, pg 2 (15 September 1995); doi: 10.1117/12.221156
Proc. SPIE 2642, Micromachined Devices and Components, pg 3 (15 September 1995); doi: 10.1117/12.221157
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