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15 September 1995 ARROW-based integrated optical pressure sensors
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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221175
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
In this paper, we present a review of micromechanical Mach-Zehnder interferometer pressure sensors based on silicon integrated optics. The sensors are based on the ARROW waveguide structure and fabricated using IC compatible dielectrics.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kamel Benaissa and Arokia Nathan "ARROW-based integrated optical pressure sensors", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221175
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