15 September 1995 Characterization of a surface micromachined pressure sensor array
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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221177
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are based upon deformable, silicon nitride diaphragms with polysilicon piezoresistors. Absolute pressure is detected by virtue of reference pressure cavities underneath the diaphragms. For this type of sensor, design tradeoffs must be made among allowable diaphragm deflection, diaphragm size, and desireable pressure ranges. Several fabrication issues were observed and addressed. Offset voltage, sensitivity, and nonlinearity of 100 micrometers diameter sensors were measured.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William P. Eaton, William P. Eaton, James H. Smith, James H. Smith, } "Characterization of a surface micromachined pressure sensor array", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221177; https://doi.org/10.1117/12.221177
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