Chemical gas sensors on silicon

Henry G. Hughes

doi:10.1117/12.221158

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15 September 1995 Chemical gas sensors on silicon

Henry G. Hughes

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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221158
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Gas sensors have been used and available for many years. While there are many different types of gas sensors and detecting materials, metal oxides are commonly used for the detection of various gases, such as carbon monoxide (CO), methane (CH₄), and other hydrocarbons. Such sensors are used in environmental, commercial HVAC, home, and industrial applications. One of these metal oxides, tin oxide, is very stable in air at temperatures > 500 degrees C, and is readily processed using ceramic or thin-film techniques. The thin films on silicon can be doped with inpurities using standard diffusion or spin-on methods, which influence the sensitivity, selectivity, and stability of the sensors. Thin- film tin oxide on silicon CO gas sensors have been characterized. The structure, chemistry, and response results are reported.

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Henry G. Hughes "Chemical gas sensors on silicon", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221158

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