15 September 1995 Measurement of static friction in mechanical couplings of articulated microrobots
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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221182
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Force measurements from 3D polysilicon mechanisms under various loading conditions are presented. Force was measured using the deflection of polysilicon spring gauges with known dimensions and estimated elastic properties. Force measurements were made to determine the force required to overcome static friction when rotating hinged structures with and without external loading using a sliding mechanism. Both loaded and unloaded mechanisms display a wide statistical variation in friction force. Unloaded mechanisms require on average 1-5 (mu) N of force to move, whereas mechanisms manipulating 3.5 (mu) N loads require on average 1-10 (mu) N of force. These measurements are motivated by an effort to produce articulated microrobots, and progress in this area is also discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard Yeh, Richard Yeh, Kristofer S. J. Pister, Kristofer S. J. Pister, } "Measurement of static friction in mechanical couplings of articulated microrobots", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221182; https://doi.org/10.1117/12.221182

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