15 September 1995 Microelectromechanical gyroscope: analysis and simulation using SPICE electronic simulator
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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221172
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Microgyroscope applications are increasing in many fields, creating a need to develop low cost, compact gyroscopes. A full understanding of the operation principles and limitations of a rate gyroscope are essential in creating a small and low-cost device. Currently, there is no simulation tool available that can simulate both the electronic and nonelectronic components of a complete device. The work described in this paper presents a method to simulate a complete comb-drive rate microgyroscope using the SPICE electronic simulation tool. The simulation method given here can be generalized to a wide range of MEMS devices. An equivalent circuit was developed and simulated using SPICE. Results of the frequency response, and transient analysis are given. The results obtained reproduce the reported device operation. A set of important new findings are revealed from the analysis using this new tool. Using the transient analysis, for example, we can see that the requirement of a large quality factor of the sensor causes a very slow (open-loop) response and that a closed-loop operation is essential in this device. In addition, the nonideal factors are described and are analyzed using SPICE.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Amit Burstein and William J. Kaiser "Microelectromechanical gyroscope: analysis and simulation using SPICE electronic simulator", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221172; https://doi.org/10.1117/12.221172

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