Micromachined hydrocarbon-based gas sensors

Ashok Srivastava; Naveen George; J. Cherukuri

doi:10.1117/12.221160

15 September 1995 Micromachined hydrocarbon-based gas sensors

Ashok Srivastava, Naveen George, J. Cherukuri

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221160
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

We report the technology for the design and fabrication of bulk-micromachined hydrocarbon based gas sensors in standard two micron n-well CMOS process. The hydrocarbon based gas sensor is a palladium-oxide-polysilicon type MOS structure. The gas sensor is realized in three steps: the layout design in CMOS technology using VLSI CAD tools, post-processing on fabricated CMOS devices followed by the deposition of palladium. The design includes additional layer in CMOS called 'open' which enables the formation of a 'cavity' in the silicon substrate and results in a micromachined structure. After the fabrication of CMOS devices a single maskless etch in an aqueous solution of ethylenediamine-pyrocatechol or xenon difluoride is done to create a 'cavity' followed by gas in palladium changes the C-V characteristics of the MOS structure and is detected through an integrated readout CMOS electronics.

Citation Download Citation

Ashok Srivastava, Naveen George, and J. Cherukuri "Micromachined hydrocarbon-based gas sensors", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221160

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