15 September 1995 Recent trends in silicon micromachining technology
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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221157
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
The rapid expansion in number and scope of research projects in the general area of micromachining technology makes the field especially interesting. Advances, particularly from universities and research institutes, suggest that increased commercial development is likely in a number of new fields. The nature of the fabrication technologies used to make these prototype parts, however, lead to difficulties in quickly reaping commercial benefits from these technolgoical advancements. This is in contrast to the nature of commercial development in the integrated circuit industry, where standardized processes result in rapid development of systems and products which use new designs.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John H. Jerman "Recent trends in silicon micromachining technology", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221157; https://doi.org/10.1117/12.221157
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