15 September 1995 Three-dimensional structures for micro-optical mechanical systems in standard CMOS
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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221176
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
A design is presented and tested to build and actuate reflection based 3D micro-opto- mechancial systems in standard CMOS using only a single maskless post-processing step. We have built two generations of structures and actuated them at various frequencies. The initial design uses the various components of CMOS to make a rigid box being pulled against the substrate. Results and photos are presented to show the actuation. Possible developments which take advantage of the CMOS underlying the structure are discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ezekiel J. Kruglick, Shirish Damle, Kristofer S. J. Pister, "Three-dimensional structures for micro-optical mechanical systems in standard CMOS", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221176; https://doi.org/10.1117/12.221176

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