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10 November 1995 Investigations and modeling of physical processes in high-density information recording with the help of inorganic resists
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Proceedings Volume 2647, International Conference on Holography and Correlation Optics; (1995) https://doi.org/10.1117/12.226690
Event: International Conference on Holography and Correlation Optics, 1995, Chernivsti, Ukraine
Abstract
The applications of chalcogenide glasses (CG) and the structures on their base in the technology of optical disks are reviewed. In brief are described the properties of high- resolution inorganic thin film structures CG-Ag and CG layers. The properties of such resists and peculiarities of laser lithography under the influence of sharp-focused laser irradiation with the objective of formation of master disks and the tracking guides of optical disks were investigated. It is shown that under laser exposure the local heating of the resist and also the photostructural transformations, activated by this heating, provide the narrowing of the lines of the resistive mask in comparison to the size of the exposure light spot. Using the As2S3 layers the minimal width of lines 0.17 micrometer was obtained, under the exposure wavelength 476 nm and laser spot halfwidth 1 micrometer. This enables us to decrease the period of the tracking guides with the purpose of increasing the density of information recording. The possibility is shown of the formation of the tracking guides structure with the period up to the 0.8 micrometer.
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Sergey A. Kostyukevych, Peter E. Shepeljavi, Alexander V. Stronski, and Ivan Z. Indutnyi "Investigations and modeling of physical processes in high-density information recording with the help of inorganic resists", Proc. SPIE 2647, International Conference on Holography and Correlation Optics, (10 November 1995); https://doi.org/10.1117/12.226690
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