10 November 1995 X-ray diffraction optics of the submicron surface layers
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Proceedings Volume 2647, International Conference on Holography and Correlation Optics; (1995); doi: 10.1117/12.226722
Event: International Conference on Holography and Correlation Optics, 1995, Chernivsti, Ukraine
Abstract
The scheme of x-ray diffraction on reflection for research of layers structure of single crystals after various kinds of external treatment is used. On a series of diffraction curves the profiles of distribution of deformations in thin subsurface areas of InSb and CdTe crystals irradiated by high-energy electrons and B ions are constructed. The given work demonstrates the opportunities of the skew asymmetric scheme of x-ray diffraction on reflection as in topographical, and in two crystal spectrometer scheme in research of structural changes in subsurface layers of various single crystal compounds after ion and electron irradiation.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor M. Fodchuk, A. M. Raransky, Andrij V. Evdokimenko, "X-ray diffraction optics of the submicron surface layers", Proc. SPIE 2647, International Conference on Holography and Correlation Optics, (10 November 1995); doi: 10.1117/12.226722; https://doi.org/10.1117/12.226722
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KEYWORDS
Crystals

Diffraction

Reflection

X-ray diffraction

Single crystal X-ray diffraction

Ions

Electrons

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