Analytical method for determination of absorbing film optical constants and thickness from reflectance spectra

Valery N. Filippov

doi:10.1117/12.226187

3 November 1995 Analytical method for determination of absorbing film optical constants and thickness from reflectance spectra

Valery N. Filippov

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Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226187
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine

Abstract

It is shown that the air-film material reflectance coefficient, and that for the film material- substrate, can be restored from envelopes of the interference pattern in reflectance spectra. Doing so for oblique incidence of light and for two of its polarizations, optical parameters of an absorbing film may be determined without any film dispersion assumptions. Film thickness h is calculated then analytically. Knowing h, the film absorption coefficient can be obtained with high accuracy. Numerical calculations are given to illustrate the method application.

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Valery N. Filippov "Analytical method for determination of absorbing film optical constants and thickness from reflectance spectra", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226187

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KEYWORDS

Reflectivity

Refractive index

Absorption

Interfaces

Inverse optics

Polarization

Silicon

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