Paper
3 November 1995 Diffraction optical elements with deep phase profile obtained with the use of x-ray parallel intensive beam
Voldemar Petrovich Koronkevich, G. N. Kulipanov, Oleg A. Makarov, Vladimir Nazmov, Valery F. Pindyurin, M. P. Sinyukov
Author Affiliations +
Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226228
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine
Abstract
X-ray lithography with synchrotron radiation was applied for formation of the Fresnel zone structure profile onto a curved surface of a refractive polymer lens to achieve multifocus properties of the lens. First prototypes of the hybrid refractive-diffractive lens were fabricated in such a way and their optical properties were investigated. Some possibilities for creation of diffraction apochromatic optical elements are considered as well.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Voldemar Petrovich Koronkevich, G. N. Kulipanov, Oleg A. Makarov, Vladimir Nazmov, Valery F. Pindyurin, and M. P. Sinyukov "Diffraction optical elements with deep phase profile obtained with the use of x-ray parallel intensive beam", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226228
Lens.org Logo
CITATIONS
Cited by 3 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Diffraction

Photomasks

Polymers

X-ray lithography

X-rays

Optical components

Spherical lenses

RELATED CONTENT


Back to Top