3 November 1995 Formation of phase-change and relief-change recording media by joint oxidative thermodecomposition of hexacarbonyls on the surface
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Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226239
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine
Abstract
In the paper we investigate the relationship of film composition prepared in conditions of joint oxidative hexacarbonyls thermodecomposition to the ratio of molybdenum and tungsten hexacarbonyls vapors pressure. The films are prepared in vacuum on the order of hundreds pascal in the flow reactor by controlling the deposition process. As an oxidizer we used air. The vapor pressure measured by means of thermoelectric converters using the technique to an accuracy of 5%. The film thickness was on the order of hundreds of nanometers. For substrate we used monocrystal silicon. The film composition was determined by layer-by-layer auger spectroscopy method. The investigations were pursued on the JSM-T-20 auger analyzer by internal standards method in conditions of continuous film surface etching in an argon ion beam.
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D. A. Grinko, D. A. Grinko, A. A. Krujchin, A. A. Krujchin, } "Formation of phase-change and relief-change recording media by joint oxidative thermodecomposition of hexacarbonyls on the surface", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226239; https://doi.org/10.1117/12.226239
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