3 November 1995 Scattering of laser light from a relief surface with finite conductivity
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Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226216
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine
Abstract
We present a Kirchhoff-Beckmann approximation of an algorithm for calculating the angular intensity distribution of the light scattered from a microrelief surface of finite conductivity using the algorithm of a fast Fourier transform. Results of computer-aided simulation enables us to establish both the algorithm feasibility limits and a number of relationships connecting characteristics of the scattered light with the diffraction grating parameters.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor V. Kotlyar, I. A. Pankov, Oleg Kamilevich Zalyalov, "Scattering of laser light from a relief surface with finite conductivity", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226216; https://doi.org/10.1117/12.226216
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