3 November 1995 Scattering of laser light from a relief surface with finite conductivity
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Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226216
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine
Abstract
We present a Kirchhoff-Beckmann approximation of an algorithm for calculating the angular intensity distribution of the light scattered from a microrelief surface of finite conductivity using the algorithm of a fast Fourier transform. Results of computer-aided simulation enables us to establish both the algorithm feasibility limits and a number of relationships connecting characteristics of the scattered light with the diffraction grating parameters.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor V. Kotlyar, Victor V. Kotlyar, I. A. Pankov, I. A. Pankov, Oleg Kamilevich Zalyalov, Oleg Kamilevich Zalyalov, } "Scattering of laser light from a relief surface with finite conductivity", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226216; https://doi.org/10.1117/12.226216
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