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29 March 1996 Ferroelectric liquid crystal spatial light modulators for projection display
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Proceedings Volume 2650, Projection Displays II; (1996)
Event: Electronic Imaging: Science and Technology, 1996, San Jose, CA, United States
We report prototype active-matrix liquid crystal spatial light modulators using ordinary silicon integrated-circuit backplanes and incorporating a fast-switching ferroelectric liquid crystal light modulating layer at the backplane's surface. Backplanes reported here utilize a fully- planarized three-metal CMOS process for improved optical throughput, contrast, and light tolerance. We report a 256 X 256 device with 15 micrometers SRAM pixels having 87% fill- factor, optical throughput of 36 - 45%, contrast ratio of 80:1, and electrical rise/fall times of 85 microsecond(s) . We also report DRAM arrays with pixel pitches of 7.5 micrometers and 5.7 micrometers , with fill factors of 75% and 69%, respectively.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David B. Banas, Holden Chase, Jim D. Cunningham, Mark A. Handschy, Michael Meadows, and David J. Ward "Ferroelectric liquid crystal spatial light modulators for projection display", Proc. SPIE 2650, Projection Displays II, (29 March 1996);


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