25 March 1996 Benzocyclobutene as planarization resin for charge-coupled devices
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Abstract
Benzocyclobutene (BCB) is a commercial product of The Dow Chemical Company sold under the irade name Cyclocene TM Electronic Resins for use in multi-chip modules and interlayer dielectric applications. New versions of the material are being developed as both overcoat and planarization materials for use in active and passive components of flat panel displays and charge coupled devices. Specifically, BCB has shown excellent results for color filter elements as either an overcoat or undercoat material.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Donald J. Perettie, Donald J. Perettie, Michael J. Radler, Michael J. Radler, J. L. Smith, J. L. Smith, } "Benzocyclobutene as planarization resin for charge-coupled devices", Proc. SPIE 2654, Solid State Sensor Arrays and CCD Cameras, (25 March 1996); doi: 10.1117/12.236122; https://doi.org/10.1117/12.236122
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