10 April 1996 Phase-measuring laser feedback interferometry: applications to microscopy
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This brief proceedings paper presents an introduction to our adaptation of the principles of phase shifting interferometry to a laser feedback interferometer. The application of these methods allows a direct measurement of both the optical path length and the fringe modulation. Examination of the spatial variation of both of these quantities over an object's surface provides a quantitative map of the geometry of a sample's surface. We demonstrate that discrete phase shifting methods can be used to accurately measure optical path length changes and fringe modulation.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ben Ovryn, Ben Ovryn, James H. Andrews, James H. Andrews, Steven J. Eppell, Steven J. Eppell, } "Phase-measuring laser feedback interferometry: applications to microscopy", Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, (10 April 1996); doi: 10.1117/12.237491; https://doi.org/10.1117/12.237491

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