25 March 1996 Optical microspectrometer in SiON slab waveguides
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Abstract
An integrated microspectrometer is presented using SiON-slab waveguides on silicon substrates. The microspectrometer is utilized as a versatile detection unit of micro total analysis systems by broad band VIS-spectroscopy. It is designed for efficient diffraction in the wavelength range between 300 - 700 nm, a high spectral resolution and dispersion, respectively. The spectrometer consists of a planar 5 by 5 mm2 transmission grating, a cylindric lens and a commercial silicon diode array positioned in its focus for simultaneous intensity detection of the complete visible spectrum. No moving parts and a compact optical sensor head enable mobile use free of maintenance.
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Dietmar Sander, Dietmar Sander, M.-O. Duecker, M.-O. Duecker, O. Blume, O. Blume, Joerg Mueller, Joerg Mueller, } "Optical microspectrometer in SiON slab waveguides", Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); doi: 10.1117/12.236128; https://doi.org/10.1117/12.236128
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