Actuation of polysilicon surface-micromachined mirrors

Norman C. Tien; Meng-Hsiung Kiang; Michael J. Daneman; Olav Solgaard; Kam Y. Lau; Richard S. Muller

doi:10.1117/12.234636

8 March 1996 Actuation of polysilicon surface-micromachined mirrors

Norman C. Tien, Meng-Hsiung Kiang, Michael J. Daneman, Olav Solgaard, Kam Y. Lau, Richard S. Muller

Proceedings Volume 2687, Miniaturized Systems with Micro-Optics and Micromechanics; (1996) https://doi.org/10.1117/12.234636
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Two types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 micrometers ) ranges with submicron positioning.

Citation Download Citation

Norman C. Tien, Meng-Hsiung Kiang, Michael J. Daneman, Olav Solgaard, Kam Y. Lau, and Richard S. Muller "Actuation of polysilicon surface-micromachined mirrors", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); https://doi.org/10.1117/12.234636

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available