8 March 1996 Design and fabrication issues in the development of monolithic micro-optical systems
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The micro-sensor field is presently proliferating with designs and approaches. We have recently been involved with several mini/micro optical systems which have pointed out several trends in design and fabrication that are somewhat more important to these smaller optical systems. These include; material choices, alignment strategies, fabrication methods, and freedom and complexity of the optical designs. Our recent experience indicates that since mini/micro optical systems are likely to be produced in much higher number, that traditional fabrication methods could prove exorbitantly expensive. Deterministic fabrication methods employing inherently self-aligning features are well worth investigating. This is particularly true for monolithic systems that fall into that `grey' area between mini and truly micro optical systems.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles M. Egert, Charles M. Egert, Slobodan Rajic, Slobodan Rajic, "Design and fabrication issues in the development of monolithic micro-optical systems", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234624; https://doi.org/10.1117/12.234624


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