Magnetically actuated MEMS scanning mirror

Raanan A. Miller; Geoffrey W. Burr; Yu-Chong Tai; Demetri Psaltis

doi:10.1117/12.234635

8 March 1996 Magnetically actuated MEMS scanning mirror

Raanan A. Miller, Geoffrey W. Burr, Yu-Chong Tai, Demetri Psaltis

Proceedings Volume 2687, Miniaturized Systems with Micro-Optics and Micromechanics; (1996) https://doi.org/10.1117/12.234635
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

A 4 mm by 5 mm, magnetically actuated scanning MEMS mirror is fabricated by integration of bulk silicon micromachining and magnetic thin film head techniques. Large mirror deflection angles (0 - 70 degree(s)) are achieved. The MEMS mirror is demonstrated as a laser beam scanner in both conventional and compact holographic data storage system configurations.

Citation Download Citation

Raanan A. Miller, Geoffrey W. Burr, Yu-Chong Tai, and Demetri Psaltis "Magnetically actuated MEMS scanning mirror", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); https://doi.org/10.1117/12.234635

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