Micromirror arrays for active optical aberration control

Steven C. Gustafson; Theresa A. Tuthill; Edward A. Watson

doi:10.1117/12.234629

8 March 1996 Micromirror arrays for active optical aberration control

Steven C. Gustafson, Theresa A. Tuthill, Edward A. Watson

Proceedings Volume 2687, Miniaturized Systems with Micro-Optics and Micromechanics; (1996) https://doi.org/10.1117/12.234629
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Micromirror arrays are being developed that can have up to tens of thousands of micromirror elements, each as small as 20 microns on a side, each spaced relative to neighbors so that optical efficiency exceeds 90 percent, and each individually controlled with response times as small as 10 microseconds for piston-like phase-mostly displacements that cover more than one- half optical wavelength. These arrays may be well suited for active aberration control of the focused coherent beams used in many applications, including optical disk storage, optical scanning, and laser radar systems. Active aberration control requires determination of the voltage supplied to the micromirror array elements so that constructive and destructive interference in light reflected from many elements yields the desired result. This paper discussed an approach in which the voltages are determined off-line by simulated annealing optimization and stored for real-time use.

Citation Download Citation

Steven C. Gustafson, Theresa A. Tuthill, and Edward A. Watson "Micromirror arrays for active optical aberration control", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); https://doi.org/10.1117/12.234629

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