8 March 1996 Monolithically integrated refractive microlens standing perpendicular to the substrate
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Abstract
We report the first fabrication of a spherical microlens monolithically integrated on a surface- micromachined supporting plate standing perpendicular to the substrate. The focusing and collimating abilities of the lens are successfully demonstrated.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles King, Charles King, Lih-Yuan Lin, Lih-Yuan Lin, Ming C. Wu, Ming C. Wu, } "Monolithically integrated refractive microlens standing perpendicular to the substrate", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234631; https://doi.org/10.1117/12.234631
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