8 March 1996 Novel method for making parabolic grating
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Abstract
We introduce the moving-mask method for fabrication of continuous relief grating with parabolic section profile in this paper. The depth of the grating is nearly equal to 4 micrometers , the diffraction orders from -10 to 10 has uniform intensity, such a grating can be used as multi-splitter. The grating can be concave or convex. The method presented in this paper is not only used to fabricate parabolic grating, but also has been used to generate other continuous relief patterns with line-symmetry and rotation-symmetry. Interesting experimental results are given. It is proved that this method is useful for the making of microoptics elements with continuous relief.
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Bo Chen, Bo Chen, Lurong Guo, Lurong Guo, Jiyue Tang, Jiyue Tang, Ping Xu, Ping Xu, Ming-bao Zhou, Ming-bao Zhou, } "Novel method for making parabolic grating", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234627; https://doi.org/10.1117/12.234627
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