Micromachine technology is a very promising technology: downsizing and high integration of functional components may bring about a breakthrough in industrial engineering and medical techniques in the 21st century. The Micromachine Center has carried out a range of activities for promotion of micromachines, including `Micromachine Technology Project' delegated by the government's Agency of Industrial Science and Technology. The ultimate purpose of this project is to establish technology applicable to the realization of micromachine systems. These systems are composed of microminiature functional elements, locomotive in very narrow spaces in complex equipment or inside of the human body, can perform sophisticated work autonomously, and help realize a micro factory for small industrial products. These themes include Micro-Opto-Electro-Mechanical systems as inspection modules, optical tactile sensor for medical applications, and so forth. In this paper, light driven micropump, 2D silicon micromachined optical scanner, optical tactile sensor, micro photovoltaic device, and optical processing by scanning probe microscope are described.