7 May 1996 Mass-producible microholographic tags
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Abstract
Microtags are microscopic computer-generated holograms with 130-nm features and are mass- producible with EUVL. This fabrication method renders microtags difficult to counterfeit. Applications include tagging and tracking of microprocessors, memory chips, currency, and credit cards.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William C. Sweatt, Michael R. Descour, Avijit K. Ray-Chaudhuri, Stanley H. Kravitz, Mial E. Warren, Richard H. Stulen, Daniel A. Tichenor, James H. Underwood, Kevin D. Krenz, "Mass-producible microholographic tags", Proc. SPIE 2689, Diffractive and Holographic Optics Technology III, (7 May 1996); doi: 10.1117/12.239621; https://doi.org/10.1117/12.239621
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