7 May 1996 Mass-producible microholographic tags
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Abstract
Microtags are microscopic computer-generated holograms with 130-nm features and are mass- producible with EUVL. This fabrication method renders microtags difficult to counterfeit. Applications include tagging and tracking of microprocessors, memory chips, currency, and credit cards.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William C. Sweatt, William C. Sweatt, Michael R. Descour, Michael R. Descour, Avijit K. Ray-Chaudhuri, Avijit K. Ray-Chaudhuri, Stanley H. Kravitz, Stanley H. Kravitz, Mial E. Warren, Mial E. Warren, Richard H. Stulen, Richard H. Stulen, Daniel A. Tichenor, Daniel A. Tichenor, James H. Underwood, James H. Underwood, Kevin D. Krenz, Kevin D. Krenz, } "Mass-producible microholographic tags", Proc. SPIE 2689, Diffractive and Holographic Optics Technology III, (7 May 1996); doi: 10.1117/12.239621; https://doi.org/10.1117/12.239621
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