7 May 1996 Multiproject foundry fabrication of diffractive optics
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Abstract
A cost-effective way of producing prototype multi-level phase diffractive optical elements is discussed. It is based on combining multiple projects on a single wafer to spread the non- recurring engineering costs over many users thereby reducing the cost. In this paper we discuss issues of cost versus design that were encountered in a multi-project foundry offered by Honeywell.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ravindra A. Athale, Kannan Raj, "Multiproject foundry fabrication of diffractive optics", Proc. SPIE 2689, Diffractive and Holographic Optics Technology III, (7 May 1996); doi: 10.1117/12.239616; https://doi.org/10.1117/12.239616
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