7 May 1996 Multiproject foundry fabrication of diffractive optics
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Abstract
A cost-effective way of producing prototype multi-level phase diffractive optical elements is discussed. It is based on combining multiple projects on a single wafer to spread the non- recurring engineering costs over many users thereby reducing the cost. In this paper we discuss issues of cost versus design that were encountered in a multi-project foundry offered by Honeywell.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ravindra A. Athale, Ravindra A. Athale, Kannan Raj, Kannan Raj, } "Multiproject foundry fabrication of diffractive optics", Proc. SPIE 2689, Diffractive and Holographic Optics Technology III, (7 May 1996); doi: 10.1117/12.239616; https://doi.org/10.1117/12.239616
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