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1 May 1996 Micromachined tunable Fabry-Perot filters for wavelength division multiplexing
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Micro-optical tunable Fabry-Perot filters, which utilize micro-electro-mechanical control of the cavity length and therefore the active wavelengths, are attractive components for wavelength division multiplexing applications. These vertical cavity devices are fabricated using selective etching to form an air gap between a free-standing top mirror and a bottom mirror fixed to the semiconductor substrate, and electrostatic force from applied voltage bias is used to control the vertical position of the top mirror and therefore the active wavelength of the filter. Using this approach, we have demonstrated GaAs-based devices with tuning ranges as large as 40 nm near a center wavelength of 960 nm, and maximum tuning voltages are typically 15 - 20 V. Furthermore, a wide variety of integrated components such as tunable light-emitters and lasers have been realized by incorporating a quantum well p-i-n diode into the device active region.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael C. Larson and James S. Harris Jr. "Micromachined tunable Fabry-Perot filters for wavelength division multiplexing", Proc. SPIE 2690, Wavelength Division Multiplexing Components, (1 May 1996);

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