10 January 1996 Integrated optical ring resonator on silicon with thermal tuning and in-situ temperature measurement
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Proceedings Volume 2695, Functional Photonic and Fiber Devices; (1996); doi: 10.1117/12.229974
Event: Photonics West '96, 1996, San Jose, CA, United States
Abstract
Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/ degree(s)C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/ degree(s)C.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paeivi Heimala, Pekka Katila, Jaakko Aarnio, "Integrated optical ring resonator on silicon with thermal tuning and in-situ temperature measurement", Proc. SPIE 2695, Functional Photonic and Fiber Devices, (10 January 1996); doi: 10.1117/12.229974; https://doi.org/10.1117/12.229974
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KEYWORDS
Resonators

Waveguides

Temperature metrology

Silicon

Integrated optics

Resistors

Resistance

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