5 July 1996 Very large area YBa2 Cu3O7-δ film deposition
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Large area deposition of YBa2Cu3O7-(delta ) is desirable for cost-effective production of thin superconducting films at larger scale. Our technique of thermal co-evaporation should be particularly well suited for this goal because it is intrinsically homogenous. We have achieved large area deposition by using a rotating disk heater with an oxygen pocket. This arrangement allows for intermittent metal deposition and oxidation scheme with which we fabricate separated zones.Here we present a improved version of this deposition scheme with which we fabricate high quality YBCO films on an area which is 9 inches in diameter. The area is used for simultaneous deposition on smaller wafers, e.g. 12 wafers of 2 inches, or for large sapphire wafers of 8 inches.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Helmut Kinder, Helmut Kinder, Robert Semerad, Robert Semerad, Paul Berberich, Paul Berberich, Bernd Utz, Bernd Utz, Werner Prusseit, Werner Prusseit, } "Very large area YBa2 Cu3O7-δ film deposition", Proc. SPIE 2697, Oxide Superconductor Physics and Nano-Engineering II, (5 July 1996); doi: 10.1117/12.250238; https://doi.org/10.1117/12.250238

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