10 May 1996 Progress in all-solid-state deep-ultraviolet coherent light sources
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Abstract
High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography, micro fabrication, material processing and ultra high density optical disk mastering. We report progress in improving the quality of Czochralski-grown (beta) -BaB2O4 (BBO) which is essential for generating high average output power in the deep ultraviolet regime. We obtained 1.5 W of cw 266 nm output using an external resonant doubler, 1.3 W of 213 nm output from a flashlamp pumped Q-switched Nd:YAG laser and more than 0.4 W of 213 nm radiation from a commercial 6 W diode-pumped high repetition rate Q-switched Nd:YAG laser using our melt-grown BBO crystals for the nonlinear frequency conversion. Using the cw 266 nm output speckle-free 0.25 micrometers photolithography and micro-fabrication was demonstrated.
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Michio Oka, L. Y. Liu, Werner Wiechmann, Yasujiro Taguchi, Hiroyuki Wada, Tsutomu Okamoto, Hiroshi Suganuma, Shigeo R. Kubota, "Progress in all-solid-state deep-ultraviolet coherent light sources", Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); doi: 10.1117/12.239660; https://doi.org/10.1117/12.239660
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