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10 May 1996 Progress in all-solid-state deep-ultraviolet coherent light sources
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High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography, micro fabrication, material processing and ultra high density optical disk mastering. We report progress in improving the quality of Czochralski-grown (beta) -BaB2O4 (BBO) which is essential for generating high average output power in the deep ultraviolet regime. We obtained 1.5 W of cw 266 nm output using an external resonant doubler, 1.3 W of 213 nm output from a flashlamp pumped Q-switched Nd:YAG laser and more than 0.4 W of 213 nm radiation from a commercial 6 W diode-pumped high repetition rate Q-switched Nd:YAG laser using our melt-grown BBO crystals for the nonlinear frequency conversion. Using the cw 266 nm output speckle-free 0.25 micrometers photolithography and micro-fabrication was demonstrated.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michio Oka, L. Y. Liu, Werner Wiechmann, Yasujiro Taguchi, Hiroyuki Wada, Tsutomu Okamoto, Hiroshi Suganuma, and Shigeo R. Kubota "Progress in all-solid-state deep-ultraviolet coherent light sources", Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996);

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